Stress Analysis Using Finite Element Modeling of a Novel RF Microelectromechanical System Shunt Switch Designed on Quartz Substrate for Low-voltage Applications
نویسندگان
چکیده
منابع مشابه
Design and simulation of a RF MEMS shunt capacitive switch with low actuation voltage, low loss and high isolation
According to contact type, RF MEMS switches are generally classified into two categories: Capacitive switches and Metal-to-Metal ones. The capacitive switches are capable to tolerate a higher frequency range and more power than M-to-M switches. This paper presents a cantilever shunt capacitive RF MEMS switch with characteristics such as low trigger voltage, high capacitive ratio, short switchin...
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ژورنال
عنوان ژورنال: Transactions on Electrical and Electronic Materials
سال: 2013
ISSN: 1229-7607
DOI: 10.4313/teem.2013.14.5.225